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Jaeggi, Beat; Neuenschwander, Beat; Kramer, Thorsten; Remund, Stefan Marco (2017). Influence of the pulse duration and the experimental approach onto the specific removal rate for ultra-short-pulses In: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII 10091. Bellingham: Society of Photo-Optical Instrumentation Engineers (SPIE)
Neuenschwander, Beat; Kramer, Thorsten; Lauer, B.; Jäggi, B. (March 2015). Burst mode with ps- and fs-pulses: Influence on the removal rate, surface quality and heat accumulation In: SPIE Photronics WEST Conference 9350. Bellingham: Society of Photo-Optical Instrumentation Engineers (SPIE) https://doi.org/10.1117/12.2076455