Influence of the pulse duration and the experimental approach onto the specific removal rate for ultra-short-pulses

Jaeggi, Beat; Neuenschwander, Beat; Kramer, Thorsten; Remund, Stefan Marco (2017). Influence of the pulse duration and the experimental approach onto the specific removal rate for ultra-short-pulses In: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII 10091. Bellingham: Society of Photo-Optical Instrumentation Engineers (SPIE)

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Item Type:

Conference or Workshop Item (Paper)

Division/Institute:

School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS
School of Engineering and Computer Science

Name:

Jaeggi, Beat;
Neuenschwander, Beat0000-0001-9715-8557;
Kramer, Thorsten and
Remund, Stefan Marco

ISSN:

0277-786X

ISBN:

9781510606234

Publisher:

Society of Photo-Optical Instrumentation Engineers (SPIE)

Language:

English

Submitter:

Service Account

Date Deposited:

26 Nov 2019 14:29

Last Modified:

04 Nov 2021 21:45

URI:

https://arbor.bfh.ch/id/eprint/7676

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