Wildbolz, Christoph August

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Conference or Workshop Item

Neuenschwander, Beat; Remund, Stefan; Wildbolz, Christoph August; Chaja, Michalina; Molpeceres, Carlos; Narazaki, Aiko; Qiao, Jie (2021). Machining of [100], [110] and [111] oriented silicon with ultrashort laser pulses in the NIR In: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI (p. 21). SPIE 10.1117/12.2582661

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