Klimashin, Fedor F.

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Xomalis, Angelos; Hain, Caroline; Groetsch, Alexander; Klimashin, Fedor F.; Nelis, Thomas; Michler, Johann; Schwiedrzik, Jakob (2023). Resist-Free E-beam Lithography for Patterning Nanoscale Thick Films on Flexible Substrates ACS Applied Nano Material, 6(5), pp. 3388-3394. American Chemical Society 10.1021/acsanm.2c05161

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