![]() | Up a level |
Lorenz, Pierre; Zehnder, Sarah; Ehrhardt, Martin; Frost, Frank; Zimmer, Klaus; Schwaller, Patrick (2014). Nanosecond laser-induced back side wet etching of fused silica with a copper-based absorber liquid Proc. SPIE, 8967. https://doi.org/10.1117/12.2037614