Nanosecond laser-induced back side wet etching of fused silica with a copper-based absorber liquid

Lorenz, Pierre; Zehnder, Sarah; Ehrhardt, Martin; Frost, Frank; Zimmer, Klaus; Schwaller, Patrick (2014). Nanosecond laser-induced back side wet etching of fused silica with a copper-based absorber liquid Proc. SPIE, 8967. https://doi.org/10.1117/12.2037614

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Item Type:

Conference or Workshop Item (Paper)

Division/Institute:

Department of Engineering and Information Technology
Department of Engineering and Information Technology > Institute for Applied Laser, Photonics and Surface Technologies

Name:

Lorenz, Pierre; Zehnder, Sarah; Ehrhardt, Martin; Frost, Frank; Zimmer, Klaus and Schwaller, Patrick

Language:

English

Submitter:

Admin import user

Date Deposited:

05 Nov 2019 08:01

Last Modified:

05 Nov 2019 08:01

Publisher DOI:

https://doi.org/10.1117/12.2037614

URI:

https://arbor.bfh.ch/id/eprint/7586

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