Benetti, Marco

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Oehler, Andreas; Ammann, Hubert; Benetti, Marco; Wassermann, Dominique; Jaeggi, Beat; Remund, Stefan Marco; Neuenschwander, Beat (2017). New random trigger-feature for ultrashort-pulsed laser increases throughput, accuracy and quality in micromachining applications In: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII (100910I). SPIE 10.1117/12.2252599

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