New random trigger-feature for ultrashort-pulsed laser increases throughput, accuracy and quality in micromachining applications

Oehler, Andreas; Ammann, Hubert; Benetti, Marco; Wassermann, Dominique; Jaeggi, Beat; Remund, Stefan Marco; Neuenschwander, Beat (2017). New random trigger-feature for ultrashort-pulsed laser increases throughput, accuracy and quality in micromachining applications In: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII (100910I). SPIE 10.1117/12.2252599

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Item Type:

Conference or Workshop Item (Paper)

Division/Institute:

School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS
School of Engineering and Computer Science

Name:

Oehler, Andreas;
Ammann, Hubert;
Benetti, Marco;
Wassermann, Dominique;
Jaeggi, Beat;
Remund, Stefan Marco and
Neuenschwander, Beat0000-0001-9715-8557

Publisher:

SPIE

Language:

English

Submitter:

Admin import user

Date Deposited:

17 Mar 2020 13:03

Last Modified:

04 Nov 2021 21:45

Publisher DOI:

10.1117/12.2252599

URI:

https://arbor.bfh.ch/id/eprint/7677

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