In situ SEM indentation experiments: Instruments, methodology, and applications

Ghisleni, Rudy; Rzepiejewska-Malyska, Karolin; Laetitia, Philippe; Schwaller, Patrick; Michler, Johann (2009). In situ SEM indentation experiments: Instruments, methodology, and applications Microscopy Research and Technique, 72(3), pp. 242-249. Wiley-Blackwell - STM 10.1002/jemt.20677

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The purpose of this article is to present the design and capabilities of two in situ scanning electron microscope (SEM) indentation instruments covering a large load range from μN to N. The capabilities and advantages of in situ SEM indentation are illustrated by two applications: indentation of a thin film and a nanowire. All the experiments were performed on electrodeposited cobalt, whose outstanding magnetic properties make it a candidate material for MEMS and NEMS devices

Item Type:	Journal Article (Original Article)
Division/Institute:	School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS School of Engineering and Computer Science
Name:	Ghisleni, Rudy; Rzepiejewska-Malyska, Karolin; Laetitia, Philippe; Schwaller, Patrick and Michler, Johann
ISSN:	1059-910X
Publisher:	Wiley-Blackwell - STM
Language:	English
Submitter:	Patrick Schwaller
Date Deposited:	17 Dec 2019 12:30
Last Modified:	17 Dec 2019 12:30
Publisher DOI:	10.1002/jemt.20677
ARBOR DOI:	10.24451/arbor.9293
URI:	https://arbor.bfh.ch/id/eprint/9293