High Throughput and High Precision Laser Micromachining with ps-Pulses in Synchronized Mode with a fast Polygon Line Scanner

Jäggi, B.; Neuenschwander, Beat; Zimmermann, M.; Penning, L. (2014). High Throughput and High Precision Laser Micromachining with ps-Pulses in Synchronized Mode with a fast Polygon Line Scanner In: 8th International Conference on Photonic Technologies LANE 2014. San Francisco. 01.02.2014 - 06.02.2014.

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o be competitive in laser micro machining, high throughput is an important aspect. One possibility to increase productivity is scaling up the ablation process i.e. linearly increasing the laser repetition rate together with the average power and the scan speed. In the MHz-regime high scan speeds are required which cannot be provided by commercially available galvo scanners. In this work we will report on the results by using a polygon line scanner having a maximum scan speed of 100 m/s and a 50 W ps-laser system, synchronized via the SuperSync™ technology. We will show the results concerning the removal rate and the surface quality for working at the optimum point i.e. most efficient point at repetition rates up to 8.2 MHz. © (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

Item Type:	Conference or Workshop Item (Paper)
Division/Institute:	School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS School of Engineering and Computer Science
Name:	Jäggi, B.; Neuenschwander, Beat0000-0001-9715-8557; Zimmermann, M. and Penning, L.
Language:	English
Submitter:	Service Account
Date Deposited:	17 Mar 2020 10:03
Last Modified:	04 Nov 2021 21:45
Related URLs:	Organisation
ARBOR DOI:	10.24451/arbor.7595
URI:	https://arbor.bfh.ch/id/eprint/7595