Increasing the Specific Removal Rate for Ultra Sdhort Pulsed Laser-Micromachining by Using Pulse Bursts

Kramer, Torsten; Zhang, Yiming; Jaeggi, Beat; Michalowski, Andreas; Grad, Lisa; Neuenschwander, Beat (2017). Increasing the Specific Removal Rate for Ultra Sdhort Pulsed Laser-Micromachining by Using Pulse Bursts JLMN-Journal of Laser Micro/Nanoengineering, 12(2), pp. 107-114. 10.2961/jlmn.2017.02.0011

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Item Type:	Journal Article (Original Article)
Division/Institute:	School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS School of Engineering and Computer Science
Name:	Kramer, Torsten; Zhang, Yiming; Jaeggi, Beat; Michalowski, Andreas; Grad, Lisa and Neuenschwander, Beat0000-0001-9715-8557
ISSN:	1880-0688
Language:	English
Submitter:	Service Account
Date Deposited:	22 Jan 2020 12:30
Last Modified:	09 Mar 2023 11:41
Publisher DOI:	10.2961/jlmn.2017.02.0011
Related URLs:	Publication
ARBOR DOI:	10.24451/arbor.5647
URI:	https://arbor.bfh.ch/id/eprint/5647