Nicolet, M.A.; Ryser, M.; Romano, Valerio (2015). Electrical resistivity change in amorphous Ta42Si13N45 films by stress relaxation Applied Physics, 118(3), pp. 1153-1160. Springer 10.1007/s00339-014-8931-0
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Nicolet2015_Article_ElectricalResistivityChangeInA.pdf - Published Version Available under License Publisher holds Copyright (National Licenses). Download (547kB) | Preview |
Item Type: |
Journal Article (Original Article) |
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Division/Institute: |
School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS School of Engineering and Computer Science |
Name: |
Nicolet, M.A.; Ryser, M. and Romano, Valerio |
ISSN: |
1432-0630 |
Publisher: |
Springer |
Language: |
English |
Submitter: |
Service Account |
Date Deposited: |
14 Aug 2019 12:36 |
Last Modified: |
20 Aug 2021 09:47 |
Publisher DOI: |
10.1007/s00339-014-8931-0 |
ARBOR DOI: |
10.24451/arbor.5548 |
URI: |
https://arbor.bfh.ch/id/eprint/5548 |
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