Zavedeev, E.

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Neuenschwander, Beat; Jäggi, Beat; Remund, Stefan Marco; Zavedeev, E.; Pimenov, Sergei M. (2018). Machining of semiconductors and dielectrics with ultra-short pulses: Influence of the wavelength and pulse bursts (Conference Presentation) In: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII (p. 3). SPIE 10.1117/12.2291909

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