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Remund, Stefan; Gafner, Markus; Chaja, Michalina; Urniežius, Aivaras; Butkus, Simas; Neuenschwander, Beat; Molpeceres, Carlos; Narazaki, Aiko; Qiao, Jie (2021). Comparison of ultrashort pulse laser ablation with GHz pulse bursts and MHz pulse bursts of metals, silicon, and dielectric materials In: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI (p. 10). SPIE 10.1117/12.2583192