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Hain, Caroline; Schweizer, Peter; Sturm, Patrick; Brozi, Aurelio; Thomet, Jonathan; Micher, Johann; Hessler-Wyser, Aicha; Nelis, Thomas (2023). Microwave plasma-assisted reactive HiPIMS of InN films: Plasma environment and material characterisation Surface and Coatings Technology, 454, p. 129188. Elsevier 10.1016/j.surfcoat.2022.129188
