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Lapeyre, Léo; Hain, Caroline; Sturm, Patrick; Metzger, Janos; Borzi, Aurelio; Wieczerzak, Krzysztof; Raynaud, Patrice; Michler, Johann; Nelis, Thomas (2023). Deposition and characterisation of c-axis oriented AlScN thin films via microwave plasma-assisted reactive HiPIMS Surface and Coatings Technology, 464, p. 129540. Elsevier 10.1016/j.surfcoat.2023.129540
Hain, Caroline; Schweizer, Peter; Sturm, Patrick; Brozi, Aurelio; Thomet, Jonathan; Micher, Johann; Hessler-Wyser, Aicha; Nelis, Thomas (2023). Microwave plasma-assisted reactive HiPIMS of InN films: Plasma environment and material characterisation Surface and Coatings Technology, 454, p. 129188. Elsevier 10.1016/j.surfcoat.2022.129188
