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Stauss, S.; Schwaller, Patrick; Bucaille, J.-L.; Rabe, R.; Rohr, L.; Michler, J.; Blank, E. (2003). Determining the stress–strain behaviour of small devices by nanoindentation in combination with inverse methods Microelectronic Engineering, 67-68, pp. 818-825. Elsevier 10.1016/S0167-9317(03)00192-8