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Lapeyre, Léo; Hain, Caroline; Sturm, Patrick; Metzger, Janos; Borzi, Aurelio; Wieczerzak, Krzysztof; Raynaud, Patrice; Michler, Johann; Nelis, Thomas (2023). Deposition and characterisation of c-axis oriented AlScN thin films via microwave plasma-assisted reactive HiPIMS Surface and Coatings Technology, 464, p. 129540. Elsevier 10.1016/j.surfcoat.2023.129540
