Oehler, A.

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Jaeggi, Beat; Neuenschwander, Beat; Zimmermann, Markus; Penning, L.; deLoor, R.; Weingarten, K.; Oehler, A. (2014). High-throughput and high-precision laser micromachining with ps-pulses in synchronized mode with a fast polygon line scanner In: SPIE LASE. San Francisco, California, United States. 06.04.2014. 10.1117/12.2037379

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