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Hirsiger, Thomas; Gafner, Markus; Remund, Stefan M.; Chaja, Michalina W.; Urniezius, Aivaras; Butkus, Simas; Neuenschwander, Beat; Račiukaitis, Gediminas; Molpeceres, Carlos; Narazaki, Aiko; Qiao, Jie (2020). Machining metals and silicon with GHz bursts: Surprising tremendous reduction of the specific removal rate for surface texturing applications In: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV (p. 27). SPIE 10.1117/12.2543948
