Hegedus, E.

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Journal Article

Gassner, G.; Patscheider, J.; Mayrhofer, P. H.; Hegedus, E.; Tóth, L.; Kovacs, I.; Pécz, B.; Srot, V.; Scheu, Ch.; Mitterer, C. (2006). Structure of sputtered nanocomposite CrC[sub x]∕a-C:H thin films Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 24(4), p. 1837. 10.1116/1.2216713

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