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Lapeyre, Léo; Hain, Caroline; Sturm, Patrick; Metzger, Janos; Borzi, Aurelio; Wieczerzak, Krzysztof; Raynaud, Patrice; Michler, Johann; Nelis, Thomas (2023). Deposition and characterisation of c-axis oriented AlScN thin films via microwave plasma-assisted reactive HiPIMS Surface and Coatings Technology, 464, p. 129540. Elsevier 10.1016/j.surfcoat.2023.129540
Hain, Caroline; Schweizer, Peter; Sturm, Patrick; Brozi, Aurelio; Thomet, Jonathan; Micher, Johann; Hessler-Wyser, Aicha; Nelis, Thomas (2023). Microwave plasma-assisted reactive HiPIMS of InN films: Plasma environment and material characterisation Surface and Coatings Technology, 454, p. 129188. Elsevier 10.1016/j.surfcoat.2022.129188
Xomalis, Angelos; Hain, Caroline; Groetsch, Alexander; Klimashin, Fedor F.; Nelis, Thomas; Michler, Johann; Schwiedrzik, Jakob (2023). Resist-Free E-beam Lithography for Patterning Nanoscale Thick Films on Flexible Substrates ACS Applied Nano Material, 6(5), pp. 3388-3394. American Chemical Society 10.1021/acsanm.2c05161
Hain, Caroline; Brown, David; Welsh, Alexander; Wieczerzak, Krzystof; Weiss, Robert; Michler, Johann; Hessler-Wyser, Aicha; Nelis, Thomas (2022). From pulsed-DCMS and HiPIMS to microwave plasma-assisted sputtering: Their influence on the properties of diamond-like carbon films Surface and Coatings Technology, 432, p. 127928. Elsevier 10.1016/j.surfcoat.2021.127928
Lapeyre, L.; Wieczerzak, K.; Hain, Caroline; Metzger, J.; Sharma, A.; Bensaoula, Abdelhak; Michler, J.; Nelis, Thomas (2022). Influence of HiPIMS pulse widths on the deposition behaviour and properties of CuAgZr compositionally graded films Surface and Coatings Technology, 450, p. 129002. Elsevier 10.1016/j.surfcoat.2022.129002
