Emmerlich, J.

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Eklund, P.; Emmerlich, J.; Högberg, H.; Wilhelmsson, O.; Isberg, P.; Birch, J.; Persson, P. O. Å.; Jansson, U.; Hultman, L. (2005). Structural, electrical, and mechanical properties of nc-TiC∕a-SiC nanocomposite thin films Journal of Vacuum Science & Technology B, 23(6), p. 2486. American Vacuum Society (AVS) 10.1116/1.2131081

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