Ehrhardt, Martin

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Lorenz, Pierre; Zehnder, Sarah; Ehrhardt, Martin; Frost, Frank; Zimmer, Klaus; Schwaller, Patrick (2014). Nanosecond laser-induced back side wet etching of fused silica with a copper-based absorber liquid Proc. SPIE, 8967. https://doi.org/10.1117/12.2037614

Zehnder, Sarah; Lorenz, Pierre; Ehrhardt, Martin; Zimmer, Klaus; Schwaller, Patrick (2014). Laser-induced processes on the back side of dielectric surfaces using a CuSO4-based absorber liquid Proc. SPIE, 8968, p. 896812. 10.1117/12.2037629

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