Increasing the Specific Removal Rate for Ultra Short Pulsed Laser-Micromachining by Using Pulse Bursts

Kramer, ThorstenThorstenKramerZhang, YimingYimingZhangRemund, Stefan MarcoStefan MarcoRemundMichalowski, AndreasAndreasMichalowskiGrad, LisaLisaGradNeuenschwander, BeatBeatNeuenschwanderJäggi, BeatBeatJäggi2024-11-192024-11-1920151880-068810.24451/arbor.7633https://doi.org/10.24451/arbor.763310.2961/jlmn.2017.02.0011https://arbor.bfh.ch/handle/arbor/33274Increasing the Specific Removal Rate for Ultra Short Pulsed Laser-Micromachining by Using Pulse Bursts-conference_item