Ultra-high-precision surface structuring by synchronizing a galvo scanner with an ultra-short-pulsed laser system in MOPA arrangement

Jaeggi, BeatBeatJaeggiNeuenschwander, BeatBeatNeuenschwanderHunziker, UrsUrsHunzikerZuercher, JosephJosephZuercherMeier, ThomasThomasMeierZimmermann, MarkusMarkusZimmermannSelbmann, Karl-HeinzKarl-HeinzSelbmannHennig, GuidoGuidoHennig2024-11-192024-11-19201210.24451/arbor.11317https://doi.org/10.24451/arbor.1131710.1117/12.909844https://arbor.bfh.ch/handle/arbor/31685QCUltra-high-precision surface structuring by synchronizing a galvo scanner with an ultra-short-pulsed laser system in MOPA arrangement-conference_item