New random trigger-feature for ultrashort-pulsed laser increases throughput, accuracy and quality in micromachining applications

Oehler, Andreas; Ammann, Hubert; Benetti, Marco; Wassermann, Dominique; Jaeggi, Beat; Remund, Stefan Marco; Neuenschwander, Beat (2017). New random trigger-feature for ultrashort-pulsed laser increases throughput, accuracy and quality in micromachining applications In: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII (100910I). SPIE 10.1117/12.2252599

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Item Type:	Conference or Workshop Item (Paper)
Division/Institute:	School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS School of Engineering and Computer Science
Name:	Oehler, Andreas; Ammann, Hubert; Benetti, Marco; Wassermann, Dominique; Jaeggi, Beat; Remund, Stefan Marco and Neuenschwander, Beat0000-0001-9715-8557
Publisher:	SPIE
Language:	English
Submitter:	Service Account
Date Deposited:	17 Mar 2020 13:03
Last Modified:	04 Nov 2021 21:45
Publisher DOI:	10.1117/12.2252599
URI:	https://arbor.bfh.ch/id/eprint/7677