Zhang, Yiming; Lauer, Benjamin; Neuenschwander, Beat; Romano, Valerio (2016). Numerical study of the influence of picosecond laser spot size on ablated depth and threshold fluence of metal In: Proc. of SPIE Vol. 9735 97350M-1, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI (97350M). SPIE 10.1117/12.2210981
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Item Type: |
Conference or Workshop Item (Paper) |
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Division/Institute: |
School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS School of Engineering and Computer Science |
Name: |
Zhang, Yiming; Lauer, Benjamin; Neuenschwander, Beat  0000-0001-9715-8557 and Romano, Valerio |
ISSN: |
0277-786X |
Publisher: |
SPIE |
Language: |
English |
Submitter: |
Service Account |
Date Deposited: |
20 Aug 2019 10:34 |
Last Modified: |
04 Nov 2021 21:45 |
Publisher DOI: |
10.1117/12.2210981 |
Additional Information: |
Copyright(2016) Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited |
ARBOR DOI: |
10.24451/arbor.7632 |
URI: |
https://arbor.bfh.ch/id/eprint/7632 |
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