Laser Micromachining

Neuenschwander, Beat (2021). Laser Micromachining In: Handbook of Laser Technology and Applications. Handbook of Laser Technology and Applications: Vol. III (pp. 47-69). 6000 Broken Sound Parkway NW, Suite 300, Boca Raton, FL 33487-2742: CRC Press Taylor and Francis Group

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Beat Neuenschwander CONTENTS 5.1 Introduction 5.2 Basics 5.2.1 Energy Transfer 5.2.2 Absorption of Light 5.2.3 Heat Transfer for Long (Nanosecond) Pulses 5.2.3.1 Heat Diffusion Equation 5.2.3.2 Point Source in Infinite Homogeneous 3D Body 5.2.3.3 Linear Heat Conduction 5.2.3.4 Enthalpy Model 5.2.4 Heat Transfer for Ultra-short Pulses 5.2.4.1 Two-temperature Model 5.2.4.2 Metals 5.2.4.3 Dielectrics and Semiconductors 5.2.5 Heat Accumulation 5.3 Optimized Material Removal 5.3.1 Problem 5.3.2 Ablation Efficiency 5.3.2.1 Top Hat Intensity Distribution 5.3.2.2 Gaussian Beam 5.3.3 Specific Removal Rate 5.3.4 Consequences from the Model 5.3.5 Incubation 5.3.6 Influence of the Pulse Duration 5.3.7 Influence on the Machining Quality 5.3.7.1 Metals 5.3.7.2 Semiconductors: Silicon and Germanium 5.4 Power Scale-up for Surface Structuring: Demands, Solutions and Limiting Factors 5.4.1 Surface Structuring 5.4.2 Marking Speed and Power Scale-up 5.4.3 Limiting Factors 5.4.3.1 Heat Accumulation 5.4.3.2 Plasma and Particle Shielding 5.4.4 Pulse Bursts 5.4.5 Alternative Approaches 5.5 Summary and Future Challenges References

Item Type:

Book Section (Book Chapter)

Division/Institute:

School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS > ALPS / Laser Surface Engineering

Name:

Neuenschwander, Beat0000-0001-9715-8557

Subjects:

Q Science > QC Physics

ISBN:

9781315310855

Series:

Handbook of Laser Technology and Applications

Publisher:

CRC Press Taylor and Francis Group

Language:

English

Submitter:

Beat Neuenschwander

Date Deposited:

15 Jul 2021 07:38

Last Modified:

04 Nov 2021 21:46

URI:

https://arbor.bfh.ch/id/eprint/15147

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