Jaeggi, Beat; Neuenschwander, Beat; Hunziker, Urs; Zuercher, Joseph; Meier, Thomas; Zimmermann, Markus; Selbmann, Karl-Heinz; Hennig, Guido (2012). Ultra-high-precision surface structuring by synchronizing a galvo scanner with an ultra-short-pulsed laser system in MOPA arrangement In: SPIE LASE. San Francisco, California, USA. 15.02.2012. 10.1117/12.909844
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Item Type: |
Conference or Workshop Item (Paper) |
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Division/Institute: |
School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS |
Name: |
Jaeggi, Beat; Neuenschwander, Beat  0000-0001-9715-8557; Hunziker, Urs; Zuercher, Joseph; Meier, Thomas; Zimmermann, Markus; Selbmann, Karl-Heinz and Hennig, Guido |
Subjects: |
Q Science > QC Physics |
Submitter: |
Beat Neuenschwander |
Date Deposited: |
21 Apr 2020 11:39 |
Last Modified: |
04 Nov 2021 21:46 |
Publisher DOI: |
10.1117/12.909844 |
Additional Information: |
Copyright 2012 Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited |
ARBOR DOI: |
10.24451/arbor.11317 |
URI: |
https://arbor.bfh.ch/id/eprint/11317 |
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