Numerical study of the influence of picosecond laser spot size on laser ablation of metal for high laser fluence cases

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Published
Date Issued
2017
Author(s)
Zhang, Yiming
Type
Conference Paper
Language
English
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Conference
Proc. of SPIE Vol. 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
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SPIE
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ServiceAccount
Citation apa
Zhang, Y., Neuenschwander, B., & Romano, V. (2017). Numerical study of the influence of picosecond laser spot size on laser ablation of metal for high laser fluence cases. Proc. of SPIE Vol. 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII. SPIE. https://doi.org/10.24451/arbor.7675
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© (2017) Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited
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