Increasing the Specific Removal Rate for Ultra Short Pulsed Laser-Micromachining by Using Pulse Bursts

URI
Version
Published
Date Issued
2015
Author(s)
Zhang, Yiming
Michalowski, Andreas
Grad, Lisa
Jäggi, Beat
Type
Conference Paper
DOI
Publisher DOI
Journal
Journal of Laser Micro/Nanoengineering
ISSN
1880-0688
Organization
Volume
12
Issue
2
Conference
LPM2016
Publisher
Japan Laser Processing Society
Submitter
ServiceAccount
Citation apa
Kramer, T., Zhang, Y., Remund, S. M., Michalowski, A., Grad, L., Neuenschwander, B., & Jäggi, B. (2015). Increasing the Specific Removal Rate for Ultra Short Pulsed Laser-Micromachining by Using Pulse Bursts. In Journal of Laser Micro/Nanoengineering (Vol. 12, Issue 2). Japan Laser Processing Society. https://doi.org/10.24451/arbor.7633
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