New random trigger-feature for ultrashort-pulsed laser increases throughput, accuracy and quality in micromachining applications

URI
Version
Published
Date Issued
2017
Author(s)
Oehler, Andreas
Ammann, Hubert
Benetti, Marco
Wassermann, Dominique
Jaeggi, Beat
Type
Conference Paper
Language
English
Publisher DOI
Organization
Conference
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
Publisher
SPIE
Submitter
ServiceAccount
Citation apa
Oehler, A., Ammann, H., Benetti, M., Wassermann, D., Jaeggi, B., Remund, S. M., & Neuenschwander, B. (2017). New random trigger-feature for ultrashort-pulsed laser increases throughput, accuracy and quality in micromachining applications. Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII. SPIE. https://arbor.bfh.ch/handle/arbor/38898