New random trigger-feature for ultrashort-pulsed laser increases throughput, accuracy and quality in micromachining applications

URI
Version
Date Issued
2017
Author(s)
Oehler, Andreas
Ammann, Hubert
Benetti, Marco
Wassermann, Dominique
Jaeggi, Beat
Remund, Stefan Marco
Neuenschwander, Beat
Type
Language
Publisher DOI
Organization
Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS
Technik und Informatik
Conference
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
Publisher
SPIE
Submitter
ServiceAccount
Citation apa
Oehler, A., Ammann, H., Benetti, M., Wassermann, D., Jaeggi, B., Remund, S. M., & Neuenschwander, B. (2017). New random trigger-feature for ultrashort-pulsed laser increases throughput, accuracy and quality in micromachining applications. Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII. SPIE. https://arbor.bfh.ch/handle/arbor/38898