SystemC-AMS/MDVP-based modeling for the virtual prototyping of MEMS applications

This paper aims at providing guidelines to select the right modeling style for MEMS simulation in order to perform system analysis. This paper presents how an application with micro-electro-mechanical system (MEMS) sensors controlled by software can be modeled and simulated at high abstraction level. The overall modeling and simulation methodology lies on the extensions of SystemC named SystemC AMS/MDVP. In order to illustrate our approach, a case study is presented which integrate three-axis MEMS containing an accelerometer, a gyroscope, a magnetometer, and its associated CPU. A special focus is put on the MEMS gyroscope.