Time-optimized laser micro machining by using a new high dynamic and high precision galvo scanner

Jaggi, Beat; Neuenschwander, Beat; Zimmermann, Markus; Zecherle, Markus; Boeckler, Ernst W.

Time-optimized laser micro machining by using a new high dynamic and high precision galvo scanner

URI

https://arbor.bfh.ch/handle/arbor/37880

Version

Published

Date Issued

2016

Author(s)

Jaggi, Beat

Neuenschwander, Beat

Zimmermann, Markus

Zecherle, Markus

Boeckler, Ernst W.

Type

Conference Paper

Language

English

Publisher DOI

10.1117/12.2210791

Journal

Proc. SPIE

Organization

Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS

Technik und Informatk

Volume

9735

Conference

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI

Publisher

SPIE

Submitter

ServiceAccount

Citation apa

Jaggi, B., Neuenschwander, B., Zimmermann, M., Zecherle, M., & Boeckler, E. W. (2016). Time-optimized laser micro machining by using a new high dynamic and high precision galvo scanner. In Proc. SPIE (Vol. 9735). SPIE. https://arbor.bfh.ch/handle/arbor/37880