High throughput ps-laser micro machining with a synchronized polygon line scanner

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Version
Published
Date Issued
2014
Author(s)
Jaeggi, Beat
de Loor, R.
Penning, L.
Type
Conference Paper
Language
English
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LANE 2014 8th International Conference on Photonic Technologies
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ServiceAccount
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Jaeggi, B., Neuenschwander, B., Zimmermann, M., de Loor, R., & Penning, L. (2014). High throughput ps-laser micro machining with a synchronized polygon line scanner. LANE 2014 8th International Conference on Photonic Technologies. https://doi.org/10.24451/arbor.7688
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