Self-matching plasma sources using 2.45 GHz solid-state generators: microwave design and operating performance
Version
Published
Date Issued
2017
Author(s)
Type
Article
Language
English
Publisher DOI
Journal or Serie
Journal of Microwave Power and Electromagnetic Energy
ISSN
0832-7823
Volume
51
Issue
4
Publisher
Taylor & Francis
Submitter
ServiceAccount
Citation apa
Latrasse, L., Radoiu, M., Nelis, T., & Antonin, O. (2017). Self-matching plasma sources using 2.45 GHz solid-state generators: microwave design and operating performance. In Journal of Microwave Power and Electromagnetic Energy (Vol. 51, Issue 4, pp. 237–258). Taylor & Francis. https://doi.org/10.24451/arbor.6036
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