Ultra-high-precision surface structuring by synchronizing a galvo scanner with an ultra-short-pulsed laser system in MOPA arrangement
Version
Published
Date Issued
2012
Author(s)
Jaeggi, Beat
Zuercher, Joseph
Meier, Thomas
Hennig, Guido
Type
Conference Paper
Subjects
QC Physics
Publisher DOI
Conference
SPIE LASE
Submitter
Neuenschwander, Beat
Citation apa
Jaeggi, B., Neuenschwander, B., Hunziker, U., Zuercher, J., Meier, T., Zimmermann, M., Selbmann, K.-H., & Hennig, G. (2012). Ultra-high-precision surface structuring by synchronizing a galvo scanner with an ultra-short-pulsed laser system in MOPA arrangement. SPIE LASE. https://doi.org/10.24451/arbor.11317
Note
Copyright 2012 Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited
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