Influence of the pulse duration and the experimental approach onto the specific removal rate for ultra-short-pulses
Version
Published
Date Issued
2017
Author(s)
Type
Conference Paper
Language
English
ISBN
9781510606234
ISSN
0277-786X
Volume
10091
Conference
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
Publisher
Society of Photo-Optical Instrumentation Engineers (SPIE)
Submitter
ServiceAccount
Citation apa
Jaeggi, B., Neuenschwander, B., Kramer, T., & Remund, S. M. (2017). Influence of the pulse duration and the experimental approach onto the specific removal rate for ultra-short-pulses (Vol. 10091). Society of Photo-Optical Instrumentation Engineers (SPIE). https://arbor.bfh.ch/handle/arbor/38724