Numerical study of the influence of picosecond laser spot size on ablated depth and threshold fluence of metal

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Date Issued
2016
Author(s)
Zhang, Yiming
Lauer, Benjamin
Type
Conference Paper
Language
English
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0277-786X
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Conference
Proc. of SPIE Vol. 9735 97350M-1, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI
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SPIE
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ServiceAccount
Citation apa
Zhang, Y., Lauer, B., Neuenschwander, B., & Romano, V. (2016). Numerical study of the influence of picosecond laser spot size on ablated depth and threshold fluence of metal. Proc. of SPIE Vol. 9735 97350M-1, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI. SPIE. https://doi.org/10.24451/arbor.7632
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Copyright(2016) Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited
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