Burst mode with ps- and fs-pulses: Influence on the removal rate, surface quality and heat accumulation
Version
Published
Date Issued
2015-03
Author(s)
Type
Conference Paper
Language
English
Publisher DOI
ISSN
0277-786X
Volume
9350
Conference
SPIE Photronics WEST Conference
Publisher
Society of Photo-Optical Instrumentation Engineers (SPIE)
Submitter
ServiceAccount
Citation apa
Neuenschwander, B., Kramer, T., Lauer, B., & Jäggi, B. (2015). Burst mode with ps- and fs-pulses: Influence on the removal rate, surface quality and heat accumulation (Vol. 9350). Society of Photo-Optical Instrumentation Engineers (SPIE). https://doi.org/10.24451/arbor.7604
Note
Copyright 2015, Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited
File(s)![Thumbnail Image]()
Loading...
open access
Name
Manuscript_4.pdf
License
Publisher
Size
2.02 MB
Format
Adobe PDF
Checksum (MD5)
b2eb0e216a97bd66a59214b8a4e70d8f