Optimizing the specific removal rate with the burst mode under varying conditions

Jäggi, Beat; Remund, Stefan Marco; Zhang, Yiming; Kramer, Thorsten; Neuenschwander, Beat

Optimizing the specific removal rate with the burst mode under varying conditions

URI

https://arbor.bfh.ch/handle/arbor/38736

Version

Published

Date Issued

2017

Author(s)

Jäggi, Beat

Remund, Stefan Marco

Zhang, Yiming

Kramer, Thorsten

Neuenschwander, Beat

Type

Conference Paper

Language

English

Journal

JLMN-Journal of Laser Micro/Nanoengineering

Publisher URL

http://www.jlps.gr.jp/jlmn/assets/42f44cfa1c40bc3ee4d989f2e6c246aa.pdf

Related URL

https://arbor.bfh.ch/9378/ dataset

Organization

Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS

Technik und Informatk

Volume

12

Issue

3

Conference

18t International Symposium on Laser Precision Microfabrication

Submitter

ServiceAccount

Citation apa

Jäggi, B., Remund, S. M., Zhang, Y., Kramer, T., & Neuenschwander, B. (2017). Optimizing the specific removal rate with the burst mode under varying conditions. In JLMN-Journal of Laser Micro/Nanoengineering (Vol. 12, Issue 3). https://arbor.bfh.ch/handle/arbor/38736