Rapid depth profiling of lead zirconate titanate (PZT) thin films by pulsed glow-discharge optical emission spectroscopy

Schwaller, Patrick; Aeberhard, M.; Nelis, Thomas; Fischer, A.; Thapliyal, R.; Michler, J. (2006). Rapid depth profiling of lead zirconate titanate (PZT) thin films by pulsed glow-discharge optical emission spectroscopy Surface and Interface Analysis, 38(4), pp. 757-760. Wiley 10.1002/sia.2264

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Lead zirconate titanate (PZT) thin films have a large application potential in microelectronic devices, memory applications and microelectromechanical systems. Reactive sputtering of a single metallic target in a pulsed DC mode is a promising approach for a fast and cost-efficient deposition of thin PZT films on an industrial scale. However, for efficient optimization of the process parameters, it is necessary to have access to a rapid tool for chemical depth profiling. We will show in this paper that glow-discharge optical emission spectroscopy (GD-OES) is capable of yielding fast and reliable information about the PZT thin film composition. A novel pulsed mode of GD-OES was applied to bulk PZT samples (for calibrations purposes) and to thin PZT coatings. The influence of different parameters on this pulsed mode will be discussed. Using pulsed GD-OES we could successfully measure the composition of our PZT thin films and so optimize the deposition process.

Item Type:	Journal Article (Original Article)
Division/Institute:	School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS School of Engineering and Computer Science
Name:	Schwaller, Patrick; Aeberhard, M.; Nelis, Thomas0000-0002-0061-8850; Fischer, A.; Thapliyal, R. and Michler, J.
ISSN:	0142-2421
Publisher:	Wiley
Language:	English
Submitter:	Patrick Schwaller
Date Deposited:	17 Dec 2019 12:31
Last Modified:	25 Sep 2023 21:46
Publisher DOI:	10.1002/sia.2264
ARBOR DOI:	10.24451/arbor.9305
URI:	https://arbor.bfh.ch/id/eprint/9305