In situ SEM indentation experiments: Instruments, methodology, and applications

Ghisleni, Rudy; Rzepiejewska-Malyska, Karolin; Laetitia, Philippe; Schwaller, Patrick; Michler, Johann (2009). In situ SEM indentation experiments: Instruments, methodology, and applications Microscopy Research and Technique, 72(3), pp. 242-249. Wiley-Blackwell - STM 10.1002/jemt.20677

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The purpose of this article is to present the design and capabilities of two in situ scanning electron microscope (SEM) indentation instruments covering a large load range from μN to N. The capabilities and advantages of in situ SEM indentation are illustrated by two applications: indentation of a thin film and a nanowire. All the experiments were performed on electrodeposited cobalt, whose outstanding magnetic properties make it a candidate material for MEMS and NEMS devices

Item Type:

Journal Article (Original Article)

Division/Institute:

Engineering and Information Technology > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS
Engineering and Information Technology

Name:

Ghisleni, Rudy;
Rzepiejewska-Malyska, Karolin;
Laetitia, Philippe;
Schwaller, Patrick and
Michler, Johann

ISSN:

1059-910X

Publisher:

Wiley-Blackwell - STM

Language:

English

Submitter:

Patrick Schwaller

Date Deposited:

17 Dec 2019 12:30

Last Modified:

17 Dec 2019 12:30

Publisher DOI:

10.1002/jemt.20677

ARBOR DOI:

10.24451/arbor.9293

URI:

https://arbor.bfh.ch/id/eprint/9293

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