Superhard nanocomposite nc-TiC/a-C:H film fabricated by filtered cathodic vacuum arc technique

Wang, Yaohui; Zhang, Xu; Wu, Xianying; Zhang, Huixing; Zhang, Xiaoji (2008). Superhard nanocomposite nc-TiC/a-C:H film fabricated by filtered cathodic vacuum arc technique Applied Surface Science, 254(16), pp. 5085-5088. Elsevier 10.1016/j.apsusc.2008.02.011

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Superhard nanocomposite nc-TiC/a-C:H films, with an excellent combination of high elastic recovery, low friction coefficient and good H/E ratio, were prepared by filtered cathodic vacuum arc technique using the C2H2 gas as the precursor. The effect of C2H2 flow rate on the microstructure, phase composition, mechanical and tribological properties of nanocomposite nc-TiC/a-C:H films have been investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), energy disperse spectroscopy (EDS), microindentation and tribotester measurements. It was observed that the C2H2 flow rate significantly affected the Ti content and hardness of films. Furthermore, by selecting the proper value for C2H2 flow rate, 20 sccm, one can deposit the nanocomposite film nc-TiC/a-C:H with excellent properties such as superhardness (66.4 GPa), high elastic recovery (83.3%) and high H/E ratio (0.13).

Item Type:

Journal Article (Original Article)

Division/Institute:

School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS
School of Engineering and Computer Science

Name:

Wang, Yaohui;
Zhang, Xu;
Wu, Xianying;
Zhang, Huixing and
Zhang, Xiaoji

ISSN:

0169-4332

Publisher:

Elsevier

Language:

English

Submitter:

Patrick Schwaller

Date Deposited:

10 Dec 2019 09:11

Last Modified:

10 Dec 2019 09:11

Publisher DOI:

10.1016/j.apsusc.2008.02.011

ARBOR DOI:

10.24451/arbor.9277

URI:

https://arbor.bfh.ch/id/eprint/9277

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