Structural, electrical, and mechanical properties of nc-TiC∕a-SiC nanocomposite thin films

Eklund, P.; Emmerlich, J.; Högberg, H.; Wilhelmsson, O.; Isberg, P.; Birch, J.; Persson, P. O. Å.; Jansson, U.; Hultman, L. (2005). Structural, electrical, and mechanical properties of nc-TiC∕a-SiC nanocomposite thin films Journal of Vacuum Science & Technology B, 23(6), p. 2486. American Vacuum Society (AVS) 10.1116/1.2131081

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We have synthesized Ti–Si–C nanocomposite thin films by dc magnetron sputtering from a Ti3SiC2 compound target in an Ar discharge on Si(100), Al2O3(0001), and Al substrates at temperatures from room temperature to 300°C. Electron microscopy, x-ray diffraction, and x-ray photoelectron spectroscopy showed that the films consisted of nanocrystalline (nc-) TiC and amorphous (a-) SiC, with the possible presence of a small amount of noncarbidic C. The growth mode was columnar, yielding a nodular film-surface morphology. Mechanically, the films exhibited a remarkable ductile behavior. Their nanoindentation hardness and E-modulus values were 20 and 290GPa, respectively. The electrical resistivity was 330μΩcm for optimal Ar pressure (4mTorr) and substrate temperature (300°C). The resulting nc-TiC∕a-SiC films performed well as electrical contact material. These films’ electrical-contact resistance against Ag was remarkably low, 6μΩ at a contact force of 800N compared to 3.2μΩ for Ag against Ag. The chemical stability of the nc-TiC∕a-SiC films was excellent, as shown by a Battelle flowing mixed corrosive-gas test, with no N, Cl, or S contaminants entering the bulk of the films.

Item Type:	Journal Article (Original Article)
Division/Institute:	School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS School of Engineering and Computer Science
Name:	Eklund, P.; Emmerlich, J.; Högberg, H.; Wilhelmsson, O.; Isberg, P.; Birch, J.; Persson, P. O. Å.; Jansson, U. and Hultman, L.
ISSN:	0734-211X
Publisher:	American Vacuum Society (AVS)
Language:	English
Submitter:	Patrick Schwaller
Date Deposited:	09 Dec 2019 16:57
Last Modified:	09 Dec 2019 16:57
Publisher DOI:	10.1116/1.2131081
URI:	https://arbor.bfh.ch/id/eprint/9273