Jaeggi, Beat; Neuenschwander, Beat; Kramer, Thorsten; Remund, Stefan Marco (2017). Influence of the pulse duration and the experimental approach onto the specific removal rate for ultra-short-pulses In: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII 10091. Bellingham: Society of Photo-Optical Instrumentation Engineers (SPIE)
Full text not available from this repository. (Request a copy)Item Type: |
Conference or Workshop Item (Paper) |
|---|---|
Division/Institute: |
School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS School of Engineering and Computer Science |
Name: |
Jaeggi, Beat; Neuenschwander, Beat  0000-0001-9715-8557; Kramer, Thorsten and Remund, Stefan Marco |
ISSN: |
0277-786X |
ISBN: |
9781510606234 |
Publisher: |
Society of Photo-Optical Instrumentation Engineers (SPIE) |
Language: |
English |
Submitter: |
Service Account |
Date Deposited: |
26 Nov 2019 14:29 |
Last Modified: |
04 Nov 2021 21:45 |
URI: |
https://arbor.bfh.ch/id/eprint/7676 |
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