Time-optimized laser micro machining by using a new high dynamic and high precision galvo scanner

Jaggi, Beat; Neuenschwander, Beat; Zimmermann, Markus; Zecherle, Markus; Boeckler, Ernst W. (2016). Time-optimized laser micro machining by using a new high dynamic and high precision galvo scanner Proc. SPIE, 9735, p. 973513. SPIE 10.1117/12.2210791

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Item Type:

Conference or Workshop Item (Paper)

Division/Institute:

School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS
School of Engineering and Computer Science

Name:

Jaggi, Beat;
Neuenschwander, Beat0000-0001-9715-8557;
Zimmermann, Markus;
Zecherle, Markus and
Boeckler, Ernst W.

Publisher:

SPIE

Language:

English

Submitter:

Service Account

Date Deposited:

04 Dec 2019 07:40

Last Modified:

04 Nov 2021 21:45

Publisher DOI:

10.1117/12.2210791

URI:

https://arbor.bfh.ch/id/eprint/7631

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