Improvements in ultra-high precision surface structuring using synchronized galvo or polygon scanner with a laser system in MOPA arrangement

Zimmermann, Markus; Jäggi, B.; Neuenschwander, Beat (2015). Improvements in ultra-high precision surface structuring using synchronized galvo or polygon scanner with a laser system in MOPA arrangement In: SPIE Photonics WEST (p. 935016). SPIE 10.1117/12.2076724

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n earlier work the capabilities of synchronizing a galvo scanner or a polygon line scanner with a picosecond laser system in MOPA arrangement were presented. However these systems only enabled precise positioning of laser pulses on the target relatively to each other. Since then a novel approach to increase the absolute precision in positioning has been developed. This improvement enables new and more efficient process strategies such as bidirectional processing or high precision structuring of large areas in combination with additional mechanical axes. These improvements represent a major step towards large scale industrial applications in laser based micromachining.

Item Type:

Conference or Workshop Item (Paper)

Division/Institute:

Engineering and Information Technology > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS
Engineering and Information Technology

Name:

Zimmermann, Markus;
Jäggi, B. and
Neuenschwander, Beat

Publisher:

SPIE

Language:

English

Submitter:

Admin import user

Date Deposited:

21 Nov 2019 11:20

Last Modified:

19 Apr 2020 01:31

Publisher DOI:

10.1117/12.2076724

Additional Information:

Copyright 2015 Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited

ARBOR DOI:

10.24451/arbor.7605

URI:

https://arbor.bfh.ch/id/eprint/7605

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