Self-matching plasma sources using 2.45 GHz solid-state generators: microwave design and operating performance

Latrasse, Louis; Radoiu, Marilena; Nelis, Thomas; Antonin, Olivier (2017). Self-matching plasma sources using 2.45 GHz solid-state generators: microwave design and operating performance Journal of Microwave Power and Electromagnetic Energy, 51(4), pp. 237-258. Taylor & Francis 10.1080/08327823.2017.1388338

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Item Type:

Journal Article (Original Article)

Division/Institute:

School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS
School of Engineering and Computer Science

Name:

Latrasse, Louis;
Radoiu, Marilena;
Nelis, Thomas0000-0002-0061-8850 and
Antonin, Olivier

ISSN:

0832-7823

Publisher:

Taylor & Francis

Language:

English

Submitter:

Service Account

Date Deposited:

31 Jan 2020 13:43

Last Modified:

25 Sep 2023 21:45

Publisher DOI:

10.1080/08327823.2017.1388338

ARBOR DOI:

10.24451/arbor.6036

URI:

https://arbor.bfh.ch/id/eprint/6036

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